Enviromentally Friendly Food Grade 99.999% Ultra-Pure Electronic Grade Carbon Dioxide Plant:
Hot Sale Simple Process 99.999% Ultra-Pure Carbon Dioxide CO2 Manufacturing Facility for Laser Gas
![]()
Model |
Capacity (T/H) |
Purity |
Power (KW/T) |
Floor Space (M2) |
WOCO2-2.4K |
0.3 |
99.99% |
250 |
6x12 |
WOCO2-1W |
1.2 |
99.99% |
230 |
12x24 |
WOCO2-2W |
2.5 |
99.99% |
220 |
12x24 |
WOCO2-3W |
3.7 |
99.99% |
210 |
12x30 |
WOCO2-4W |
5 |
99.99% |
200 |
12x36 |
WOCO2-10W |
10 |
99.99% |
190 |
15x40 |
Parameters may vary with different carbon dioxide gas raw materials |
Due to the stringent purity requirements of high-purity (electronic grade) carbon dioxide, which must exceed 99.999% and evenreach parts per billion (PPb) levels for certain impurities, there are extremely high demands on the process design, process control, and analytical accuracy of the equipment. Leveraging over a decade of expertise in food-grade liquid carbon dioxide, WOBO selects high-quality food-grade liquid carbon dioxide as raw material and employs advanced processes such as physical adsorption and chemical treatment, combined with patented technologies. This approach ensures the stable production of ultra-high-purity (electronic grade) carbon dioxide products with purity exceeding 99.999%. The quality of these products meets the requirements of both the high-purity carbon dioxide standards of Japan's Showa Denko and the national high-purity carbon dioxide standards.
Components |
Carbon Dioxide Purity Vol.% |
Nitrogen Vol. ppm |
Argon Vol. ppm |
Carbon Monoxide Vol. ppm |
Oil Content Vol. ppm |
Volatile Hydrocarbons (Methane) Vol. ppm |
Moisture Vol. ppm |
Hydrogen Vol. ppm |
Total Sulfur (as S) Vol. ppm |
GB/T23938-2009 |
≥99.999 |
≤3.0 |
≤1.0 |
≤0.5 |
≤0.05 |
≤2.0 |
≤3.0 |
≤0.5 |
|
Shouwa Chemicals (Japan) |
≥99.999 |
≤4.0 |
≤1.0 |
≤1.0 |
≤0.05 |
≤0.5 |
≤1.0 |
≤1.0 |
≤0.03 |
San Fu Chemical Co., Ltd. (Taiwan) |
≥99.999 |
<≤4.0 |
≤1.0 |
≤0.5 |
|
≤1.0 |
≤1.0 |
≤0.5 |
|
Product Test Results |
>99.999 |
<3.0 |
<1.0 |
<0.20 |
<0. 05 |
<0.50 |
<1.0 |
<0.50 |
<0.03 |
WOBO Ultra-high-purity Carbon Dioxide Product Quality Comparison Table with Various Standards
![]()
Related Products
![]()