N2/H2/O2/Ar/He/NH3/CO2/Clean Dry Air/Point Of Use 7N-9N Purification Plant
Top Quality 10-20000Nm3/H Volatile Bases Removal Clean Dry Air Purification Device
Clean Dry Air Purification System
The Clean Dry Air purifier consists of process pipelines and an electronic control system. The PLC controls the operation of process valves, ensuring safe, stable, and continuous operation.
Dual-tower alternating adsorption, continuous gas supply
Adsorbents can be regenerated online repeatedly
316L SS EP purification vessel
PLC control system, fully automated operation
Equipped with a safety-enhanced alarm interlock function
Product Model |
WP10-A |
Purifiable Gases |
CDA |
Purification Process |
Adsorption |
Gas Source |
Outlet |
Impurities |
ppb/ppt |
H2O |
<0.1ppb |
Volatile Acids (VA) |
<10ppt |
Volatile Bases (VB) |
<10ppt |
Refractory Compounds (RC) |
<10ppt |
Total Organic Carbon (TOC) |
<10ppt |
Particles |
≤1pcs/m3
>0.003μm |
Standard Flow Rate |
10-20000Nm3/h |
The WP10-A series CDA purifier uses an adsorption process. The gas passes through the adsorption procedure at room temperature, deeply removing impurities such as H2O, volatile acids (VA), volatile bases (VB), refractory compounds (RC), and total organic carbon (TOC).
Large-scale Integrated Circuit Manufacturing |
Semiconductor Discrete Device Manufacturing |
Large Silicon Wafer Production |
Panel and Display Manufacturing |
Optical Fiber Preform Production |
High-efficiency Solar Cell Production |
LED and Laser Diode Manufacturing |
Production of Ultra High Purity Gases, Mixed Gases, and Standard Gases |